| 84 | Reactors nuclear, boilers, equipment and mechanical devices; their parts |
| 8486 | Machines and apparatus used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat display panel; machinery and equipment named in note |
| 848610 | Machinery and equipment for the production of boules or wafers |
| 84861000 | Machinery and equipment for the production of boules or wafers |